10/5/2010	12:11:39 AM	Helium valve closed
10/5/2010	12:11:39 AM	BCl3 valve closed
10/5/2010	12:11:39 AM	PH3 valve closed
10/5/2010	12:11:39 AM	SiCl4 pre valve closed
10/5/2010	12:11:39 AM	SiCl4 post valve closed
10/5/2010	12:11:39 AM	Main Vac valve closed
10/5/2010	12:11:39 AM	Bypass valve closed
10/5/2010	12:11:39 AM	H2 valve opened
10/5/2010	12:11:39 AM	Bubbler valve opened
10/5/2010	12:11:39 AM	Helium MFC set to  0.000000
10/5/2010	12:11:39 AM	H2 MFC set to  500.000000
10/5/2010	12:11:39 AM	BCl3 MFC set to  0.000000
10/5/2010	12:11:39 AM	PHl3 MFC set to  0.000000
10/5/2010	12:11:39 AM	SiCl4 MFC set to  0.000000
10/5/2010	12:11:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	12:11:39 AM	Tube furnace set to 750
10/5/2010	12:31:39 AM	H2 valve closed
10/5/2010	12:31:39 AM	BCl3 valve closed
10/5/2010	12:31:39 AM	PH3 valve closed
10/5/2010	12:31:39 AM	SiCl4 pre valve closed
10/5/2010	12:31:39 AM	SiCl4 post valve closed
10/5/2010	12:31:39 AM	Main Vac valve closed
10/5/2010	12:31:39 AM	Bypass valve closed
10/5/2010	12:31:39 AM	Helium valve opened
10/5/2010	12:31:39 AM	Bubbler valve opened
10/5/2010	12:31:39 AM	Helium MFC set to  500.000000
10/5/2010	12:31:39 AM	H2 MFC set to  0.000000
10/5/2010	12:31:39 AM	BCl3 MFC set to  0.000000
10/5/2010	12:31:39 AM	PHl3 MFC set to  0.000000
10/5/2010	12:31:39 AM	SiCl4 MFC set to  0.000000
10/5/2010	12:31:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	12:31:40 AM	Tube furnace set to 0
10/5/2010	12:46:41 AM	Helium valve closed
10/5/2010	12:46:41 AM	H2 valve closed
10/5/2010	12:46:41 AM	BCl3 valve closed
10/5/2010	12:46:41 AM	PH3 valve closed
10/5/2010	12:46:41 AM	SiCl4 pre valve closed
10/5/2010	12:46:41 AM	SiCl4 post valve closed
10/5/2010	12:46:41 AM	Main Vac valve closed
10/5/2010	12:46:41 AM	Bypass valve closed
10/5/2010	12:46:41 AM	Bubbler valve closed
10/5/2010	12:46:41 AM	Helium MFC set to  0.000000
10/5/2010	12:46:41 AM	H2 MFC set to  0.000000
10/5/2010	12:46:41 AM	BCl3 MFC set to  0.000000
10/5/2010	12:46:41 AM	PHl3 MFC set to  0.000000
10/5/2010	12:46:41 AM	SiCl4 MFC set to  0.000000
10/5/2010	12:46:41 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	12:46:41 AM	Tube furnace set to 0
10/5/2010	12:46:41 AM	Run finished at 12:46 AM
10/5/2010	12:50:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2010	12:50:36 AM	Recipe started at 12:50 AM
10/5/2010	12:50:36 AM	Helium valve closed
10/5/2010	12:50:36 AM	H2 valve closed
10/5/2010	12:50:36 AM	BCl3 valve closed
10/5/2010	12:50:36 AM	PH3 valve closed
10/5/2010	12:50:36 AM	SiCl4 pre valve closed
10/5/2010	12:50:36 AM	SiCl4 post valve closed
10/5/2010	12:50:36 AM	Main Vac valve closed
10/5/2010	12:50:36 AM	Bubbler valve closed
10/5/2010	12:50:36 AM	Bypass valve opened
10/5/2010	12:50:36 AM	Helium MFC set to  0.000000
10/5/2010	12:50:36 AM	H2 MFC set to  0.000000
10/5/2010	12:50:36 AM	BCl3 MFC set to  0.000000
10/5/2010	12:50:36 AM	PHl3 MFC set to  0.000000
10/5/2010	12:50:36 AM	SiCl4 MFC set to  0.000000
10/5/2010	12:50:36 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	12:50:36 AM	Tube furnace set to 0
10/5/2010	12:51:24 AM	Helium valve closed
10/5/2010	12:51:24 AM	H2 valve closed
10/5/2010	12:51:24 AM	BCl3 valve closed
10/5/2010	12:51:24 AM	PH3 valve closed
10/5/2010	12:51:24 AM	SiCl4 pre valve closed
10/5/2010	12:51:24 AM	SiCl4 post valve closed
10/5/2010	12:51:24 AM	Bubbler valve closed
10/5/2010	12:51:24 AM	Main Vac valve opened
10/5/2010	12:51:24 AM	Bypass valve opened
10/5/2010	12:51:24 AM	Helium MFC set to  0.000000
10/5/2010	12:51:24 AM	H2 MFC set to  0.000000
10/5/2010	12:51:24 AM	BCl3 MFC set to  0.000000
10/5/2010	12:51:24 AM	PHl3 MFC set to  0.000000
10/5/2010	12:51:24 AM	SiCl4 MFC set to  0.000000
10/5/2010	12:51:24 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	12:51:24 AM	Tube furnace set to 0
10/5/2010	12:51:24 AM	Run finished at 12:51 AM
10/5/2010	12:51:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2010	12:51:29 AM	Helium MFC set to  25.000000
10/5/2010	12:51:29 AM	Helium valve opened
10/5/2010	1:13:00 AM	Helium valve closed
10/5/2010	1:13:58 AM	Helium MFC set to  50.000000
10/5/2010	1:13:59 AM	Helium valve opened
10/5/2010	1:25:59 AM	Helium valve closed
10/5/2010	1:26:42 AM	Recipe started at 1:26 AM
10/5/2010	1:26:42 AM	Helium valve closed
10/5/2010	1:26:42 AM	BCl3 valve closed
10/5/2010	1:26:42 AM	PH3 valve closed
10/5/2010	1:26:42 AM	SiCl4 pre valve closed
10/5/2010	1:26:42 AM	SiCl4 post valve closed
10/5/2010	1:26:42 AM	Main Vac valve closed
10/5/2010	1:26:42 AM	Bypass valve closed
10/5/2010	1:26:42 AM	Bubbler valve closed
10/5/2010	1:26:42 AM	H2 valve opened
10/5/2010	1:26:42 AM	Helium MFC set to  0.000000
10/5/2010	1:26:42 AM	H2 MFC set to  500.000000
10/5/2010	1:26:42 AM	BCl3 MFC set to  0.000000
10/5/2010	1:26:42 AM	PHl3 MFC set to  0.000000
10/5/2010	1:26:42 AM	SiCl4 MFC set to  0.000000
10/5/2010	1:26:42 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	1:26:43 AM	Tube furnace set to 1000
10/5/2010	1:28:03 AM	Helium valve closed
10/5/2010	1:28:03 AM	BCl3 valve closed
10/5/2010	1:28:03 AM	PH3 valve closed
10/5/2010	1:28:03 AM	SiCl4 pre valve closed
10/5/2010	1:28:03 AM	SiCl4 post valve closed
10/5/2010	1:28:03 AM	Main Vac valve closed
10/5/2010	1:28:03 AM	Bypass valve closed
10/5/2010	1:28:03 AM	H2 valve opened
10/5/2010	1:28:03 AM	Bubbler valve opened
10/5/2010	1:28:03 AM	Helium MFC set to  0.000000
10/5/2010	1:28:03 AM	H2 MFC set to  500.000000
10/5/2010	1:28:03 AM	BCl3 MFC set to  0.000000
10/5/2010	1:28:03 AM	PHl3 MFC set to  0.000000
10/5/2010	1:28:03 AM	SiCl4 MFC set to  0.000000
10/5/2010	1:28:03 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	1:28:04 AM	Tube furnace set to 1000
10/5/2010	1:48:04 AM	Helium valve closed
10/5/2010	1:48:04 AM	BCl3 valve closed
10/5/2010	1:48:04 AM	PH3 valve closed
10/5/2010	1:48:04 AM	Main Vac valve closed
10/5/2010	1:48:04 AM	Bypass valve closed
10/5/2010	1:48:04 AM	H2 valve opened
10/5/2010	1:48:04 AM	SiCl4 pre valve opened
10/5/2010	1:48:04 AM	SiCl4 post valve opened
10/5/2010	1:48:04 AM	Bubbler valve opened
10/5/2010	1:48:04 AM	Helium MFC set to  0.000000
10/5/2010	1:48:04 AM	H2 MFC set to  500.000000
10/5/2010	1:48:04 AM	BCl3 MFC set to  0.000000
10/5/2010	1:48:04 AM	PHl3 MFC set to  0.000000
10/5/2010	1:48:04 AM	SiCl4 MFC set to  50.000000
10/5/2010	1:48:04 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	1:48:04 AM	Tube furnace set to 1000
10/5/2010	2:13:04 AM	Helium valve closed
10/5/2010	2:13:04 AM	BCl3 valve closed
10/5/2010	2:13:04 AM	PH3 valve closed
10/5/2010	2:13:04 AM	SiCl4 pre valve closed
10/5/2010	2:13:04 AM	SiCl4 post valve closed
10/5/2010	2:13:04 AM	Main Vac valve closed
10/5/2010	2:13:04 AM	Bypass valve closed
10/5/2010	2:13:04 AM	H2 valve opened
10/5/2010	2:13:04 AM	Bubbler valve opened
10/5/2010	2:13:04 AM	Helium MFC set to  0.000000
10/5/2010	2:13:04 AM	H2 MFC set to  500.000000
10/5/2010	2:13:04 AM	BCl3 MFC set to  0.000000
10/5/2010	2:13:04 AM	PHl3 MFC set to  0.000000
10/5/2010	2:13:04 AM	SiCl4 MFC set to  0.000000
10/5/2010	2:13:04 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	2:13:04 AM	Tube furnace set to 750
10/5/2010	2:33:04 AM	H2 valve closed
10/5/2010	2:33:04 AM	BCl3 valve closed
10/5/2010	2:33:04 AM	PH3 valve closed
10/5/2010	2:33:04 AM	SiCl4 pre valve closed
10/5/2010	2:33:04 AM	SiCl4 post valve closed
10/5/2010	2:33:04 AM	Main Vac valve closed
10/5/2010	2:33:04 AM	Bypass valve closed
10/5/2010	2:33:04 AM	Helium valve opened
10/5/2010	2:33:04 AM	Bubbler valve opened
10/5/2010	2:33:04 AM	Helium MFC set to  500.000000
10/5/2010	2:33:04 AM	H2 MFC set to  0.000000
10/5/2010	2:33:04 AM	BCl3 MFC set to  0.000000
10/5/2010	2:33:04 AM	PHl3 MFC set to  0.000000
10/5/2010	2:33:04 AM	SiCl4 MFC set to  0.000000
10/5/2010	2:33:04 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	2:33:04 AM	Tube furnace set to 0
10/5/2010	2:39:29 AM	Helium valve closed
10/5/2010	2:39:29 AM	H2 valve closed
10/5/2010	2:39:29 AM	BCl3 valve closed
10/5/2010	2:39:29 AM	PH3 valve closed
10/5/2010	2:39:29 AM	SiCl4 pre valve closed
10/5/2010	2:39:29 AM	SiCl4 post valve closed
10/5/2010	2:39:29 AM	Main Vac valve closed
10/5/2010	2:39:29 AM	Bypass valve closed
10/5/2010	2:39:29 AM	Bubbler valve closed
10/5/2010	2:39:29 AM	Helium MFC set to  0.000000
10/5/2010	2:39:29 AM	H2 MFC set to  0.000000
10/5/2010	2:39:29 AM	BCl3 MFC set to  0.000000
10/5/2010	2:39:29 AM	PHl3 MFC set to  0.000000
10/5/2010	2:39:29 AM	SiCl4 MFC set to  0.000000
10/5/2010	2:39:29 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	2:39:29 AM	Tube furnace set to 0
10/5/2010	2:39:29 AM	Run finished at 2:39 AM
10/5/2010	2:47:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2010	2:47:08 AM	Recipe started at 2:47 AM
10/5/2010	2:47:09 AM	Helium valve closed
10/5/2010	2:47:09 AM	H2 valve closed
10/5/2010	2:47:09 AM	BCl3 valve closed
10/5/2010	2:47:09 AM	PH3 valve closed
10/5/2010	2:47:09 AM	SiCl4 pre valve closed
10/5/2010	2:47:09 AM	SiCl4 post valve closed
10/5/2010	2:47:09 AM	Main Vac valve closed
10/5/2010	2:47:09 AM	Bubbler valve closed
10/5/2010	2:47:09 AM	Bypass valve opened
10/5/2010	2:47:09 AM	Helium MFC set to  0.000000
10/5/2010	2:47:09 AM	H2 MFC set to  0.000000
10/5/2010	2:47:09 AM	BCl3 MFC set to  0.000000
10/5/2010	2:47:09 AM	PHl3 MFC set to  0.000000
10/5/2010	2:47:09 AM	SiCl4 MFC set to  0.000000
10/5/2010	2:47:09 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	2:47:09 AM	Tube furnace set to 0
10/5/2010	2:47:56 AM	Helium valve closed
10/5/2010	2:47:56 AM	H2 valve closed
10/5/2010	2:47:56 AM	BCl3 valve closed
10/5/2010	2:47:56 AM	PH3 valve closed
10/5/2010	2:47:56 AM	SiCl4 pre valve closed
10/5/2010	2:47:56 AM	SiCl4 post valve closed
10/5/2010	2:47:56 AM	Bubbler valve closed
10/5/2010	2:47:56 AM	Main Vac valve opened
10/5/2010	2:47:56 AM	Bypass valve opened
10/5/2010	2:47:56 AM	Helium MFC set to  0.000000
10/5/2010	2:47:56 AM	H2 MFC set to  0.000000
10/5/2010	2:47:56 AM	BCl3 MFC set to  0.000000
10/5/2010	2:47:56 AM	PHl3 MFC set to  0.000000
10/5/2010	2:47:56 AM	SiCl4 MFC set to  0.000000
10/5/2010	2:47:56 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	2:47:56 AM	Tube furnace set to 0
10/5/2010	2:47:56 AM	Run finished at 2:47 AM
10/5/2010	2:47:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2010	2:48:00 AM	Helium MFC set to  50.000000
10/5/2010	2:48:01 AM	Helium valve opened
10/5/2010	3:14:01 AM	Helium valve closed
10/5/2010	3:15:07 AM	Recipe started at 3:15 AM
10/5/2010	3:15:07 AM	Helium valve closed
10/5/2010	3:15:07 AM	BCl3 valve closed
10/5/2010	3:15:07 AM	PH3 valve closed
10/5/2010	3:15:07 AM	SiCl4 pre valve closed
10/5/2010	3:15:07 AM	SiCl4 post valve closed
10/5/2010	3:15:07 AM	Main Vac valve closed
10/5/2010	3:15:07 AM	Bypass valve closed
10/5/2010	3:15:07 AM	Bubbler valve closed
10/5/2010	3:15:07 AM	H2 valve opened
10/5/2010	3:15:07 AM	Helium MFC set to  0.000000
10/5/2010	3:15:07 AM	H2 MFC set to  500.000000
10/5/2010	3:15:07 AM	BCl3 MFC set to  0.000000
10/5/2010	3:15:07 AM	PHl3 MFC set to  0.000000
10/5/2010	3:15:07 AM	SiCl4 MFC set to  0.000000
10/5/2010	3:15:07 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	3:15:07 AM	Tube furnace set to 1000
10/5/2010	3:16:27 AM	Helium valve closed
10/5/2010	3:16:27 AM	BCl3 valve closed
10/5/2010	3:16:27 AM	PH3 valve closed
10/5/2010	3:16:27 AM	SiCl4 pre valve closed
10/5/2010	3:16:27 AM	SiCl4 post valve closed
10/5/2010	3:16:27 AM	Main Vac valve closed
10/5/2010	3:16:27 AM	Bypass valve closed
10/5/2010	3:16:27 AM	H2 valve opened
10/5/2010	3:16:27 AM	Bubbler valve opened
10/5/2010	3:16:27 AM	Helium MFC set to  0.000000
10/5/2010	3:16:27 AM	H2 MFC set to  500.000000
10/5/2010	3:16:28 AM	BCl3 MFC set to  0.000000
10/5/2010	3:16:28 AM	PHl3 MFC set to  0.000000
10/5/2010	3:16:28 AM	SiCl4 MFC set to  0.000000
10/5/2010	3:16:28 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	3:16:28 AM	Tube furnace set to 1000
10/5/2010	3:17:23 AM	Run aborted at 3:17 AM
10/5/2010	3:17:23 AM	Helium valve closed
10/5/2010	3:17:23 AM	H2 valve closed
10/5/2010	3:17:23 AM	BCl3 valve closed
10/5/2010	3:17:23 AM	PH3 valve closed
10/5/2010	3:17:23 AM	SiCl4 pre valve closed
10/5/2010	3:17:23 AM	SiCl4 post valve closed
10/5/2010	3:17:23 AM	Bypass valve closed
10/5/2010	3:17:23 AM	Main Vac valve closed
10/5/2010	3:17:23 AM	Bubbler valve closed
10/5/2010	3:17:23 AM	Helium MFC set to  0.000000
10/5/2010	3:17:23 AM	H2 MFC set to  0.000000
10/5/2010	3:17:23 AM	BCl3 MFC set to  0.000000
10/5/2010	3:17:23 AM	PHl3 MFC set to  0.000000
10/5/2010	3:17:23 AM	SiCl4 MFC set to  0.000000
10/5/2010	3:17:24 AM	Tube furnace set to 0
10/5/2010	3:17:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2010	3:17:27 AM	Recipe started at 3:17 AM
10/5/2010	3:17:27 AM	Helium valve closed
10/5/2010	3:17:27 AM	H2 valve closed
10/5/2010	3:17:27 AM	BCl3 valve closed
10/5/2010	3:17:27 AM	PH3 valve closed
10/5/2010	3:17:27 AM	SiCl4 pre valve closed
10/5/2010	3:17:27 AM	SiCl4 post valve closed
10/5/2010	3:17:27 AM	Main Vac valve closed
10/5/2010	3:17:27 AM	Bubbler valve closed
10/5/2010	3:17:27 AM	Bypass valve opened
10/5/2010	3:17:27 AM	Helium MFC set to  0.000000
10/5/2010	3:17:27 AM	H2 MFC set to  0.000000
10/5/2010	3:17:27 AM	BCl3 MFC set to  0.000000
10/5/2010	3:17:27 AM	PHl3 MFC set to  0.000000
10/5/2010	3:17:27 AM	SiCl4 MFC set to  0.000000
10/5/2010	3:17:27 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	3:17:27 AM	Tube furnace set to 0
10/5/2010	3:17:46 AM	Helium valve closed
10/5/2010	3:17:46 AM	H2 valve closed
10/5/2010	3:17:46 AM	BCl3 valve closed
10/5/2010	3:17:46 AM	PH3 valve closed
10/5/2010	3:17:46 AM	SiCl4 pre valve closed
10/5/2010	3:17:46 AM	SiCl4 post valve closed
10/5/2010	3:17:46 AM	Bubbler valve closed
10/5/2010	3:17:46 AM	Main Vac valve opened
10/5/2010	3:17:46 AM	Bypass valve opened
10/5/2010	3:17:46 AM	Helium MFC set to  0.000000
10/5/2010	3:17:46 AM	H2 MFC set to  0.000000
10/5/2010	3:17:46 AM	BCl3 MFC set to  0.000000
10/5/2010	3:17:46 AM	PHl3 MFC set to  0.000000
10/5/2010	3:17:46 AM	SiCl4 MFC set to  0.000000
10/5/2010	3:17:46 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	3:17:46 AM	Tube furnace set to 0
10/5/2010	3:17:46 AM	Run finished at 3:17 AM
10/5/2010	3:17:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2010	3:18:00 AM	Helium MFC set to  75.000000
10/5/2010	3:18:00 AM	Helium valve opened
10/5/2010	3:18:41 AM	Helium valve closed
10/5/2010	3:18:46 AM	Recipe started at 3:18 AM
10/5/2010	3:18:46 AM	Helium valve closed
10/5/2010	3:18:46 AM	BCl3 valve closed
10/5/2010	3:18:46 AM	PH3 valve closed
10/5/2010	3:18:46 AM	SiCl4 pre valve closed
10/5/2010	3:18:46 AM	SiCl4 post valve closed
10/5/2010	3:18:46 AM	Main Vac valve closed
10/5/2010	3:18:46 AM	Bypass valve closed
10/5/2010	3:18:46 AM	Bubbler valve closed
10/5/2010	3:18:46 AM	H2 valve opened
10/5/2010	3:18:46 AM	Helium MFC set to  0.000000
10/5/2010	3:18:46 AM	H2 MFC set to  500.000000
10/5/2010	3:18:46 AM	BCl3 MFC set to  0.000000
10/5/2010	3:18:46 AM	PHl3 MFC set to  0.000000
10/5/2010	3:18:46 AM	SiCl4 MFC set to  0.000000
10/5/2010	3:18:46 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	3:18:46 AM	Tube furnace set to 1000
10/5/2010	3:20:05 AM	Helium valve closed
10/5/2010	3:20:05 AM	BCl3 valve closed
10/5/2010	3:20:05 AM	PH3 valve closed
10/5/2010	3:20:05 AM	SiCl4 pre valve closed
10/5/2010	3:20:05 AM	SiCl4 post valve closed
10/5/2010	3:20:05 AM	Main Vac valve closed
10/5/2010	3:20:05 AM	Bypass valve closed
10/5/2010	3:20:05 AM	H2 valve opened
10/5/2010	3:20:05 AM	Bubbler valve opened
10/5/2010	3:20:05 AM	Helium MFC set to  0.000000
10/5/2010	3:20:05 AM	H2 MFC set to  500.000000
10/5/2010	3:20:05 AM	BCl3 MFC set to  0.000000
10/5/2010	3:20:05 AM	PHl3 MFC set to  0.000000
10/5/2010	3:20:05 AM	SiCl4 MFC set to  0.000000
10/5/2010	3:20:05 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	3:20:05 AM	Tube furnace set to 1000
10/5/2010	3:40:05 AM	Helium valve closed
10/5/2010	3:40:05 AM	BCl3 valve closed
10/5/2010	3:40:05 AM	PH3 valve closed
10/5/2010	3:40:05 AM	Main Vac valve closed
10/5/2010	3:40:05 AM	Bypass valve closed
10/5/2010	3:40:05 AM	H2 valve opened
10/5/2010	3:40:05 AM	SiCl4 pre valve opened
10/5/2010	3:40:05 AM	SiCl4 post valve opened
10/5/2010	3:40:05 AM	Bubbler valve opened
10/5/2010	3:40:05 AM	Helium MFC set to  0.000000
10/5/2010	3:40:05 AM	H2 MFC set to  500.000000
10/5/2010	3:40:05 AM	BCl3 MFC set to  0.000000
10/5/2010	3:40:05 AM	PHl3 MFC set to  0.000000
10/5/2010	3:40:05 AM	SiCl4 MFC set to  50.000000
10/5/2010	3:40:05 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	3:40:05 AM	Tube furnace set to 1000
10/5/2010	4:04:18 AM	Helium valve closed
10/5/2010	4:04:18 AM	H2 valve closed
10/5/2010	4:04:18 AM	BCl3 valve closed
10/5/2010	4:04:18 AM	PH3 valve closed
10/5/2010	4:04:18 AM	SiCl4 pre valve closed
10/5/2010	4:04:18 AM	SiCl4 post valve closed
10/5/2010	4:04:18 AM	Main Vac valve closed
10/5/2010	4:04:18 AM	Bubbler valve closed
10/5/2010	4:04:18 AM	Bypass valve closed
10/5/2010	4:04:18 AM	Helium MFC set to  0.000000
10/5/2010	4:04:18 AM	H2 MFC set to  0.000000
10/5/2010	4:04:18 AM	BCl3 MFC set to  0.000000
10/5/2010	4:04:18 AM	PHl3 MFC set to  0.000000
10/5/2010	4:04:18 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:04:18 AM	Bypass solenoid MFC set to  760.000000
10/5/2010	4:04:18 AM	Tube furnace set to 0
10/5/2010	4:04:18 AM	Baratron reads 739.276665 Torr and NaOH valve is open.  Emergency exit.
10/5/2010	4:04:41 AM	Run aborted at 4:04 AM
10/5/2010	4:04:55 AM	Recipe started at 4:04 AM
10/5/2010	4:04:55 AM	Helium valve closed
10/5/2010	4:04:55 AM	BCl3 valve closed
10/5/2010	4:04:55 AM	PH3 valve closed
10/5/2010	4:04:55 AM	SiCl4 pre valve closed
10/5/2010	4:04:55 AM	SiCl4 post valve closed
10/5/2010	4:04:55 AM	Main Vac valve closed
10/5/2010	4:04:55 AM	Bypass valve closed
10/5/2010	4:04:55 AM	Bubbler valve closed
10/5/2010	4:04:55 AM	H2 valve opened
10/5/2010	4:04:55 AM	Helium MFC set to  0.000000
10/5/2010	4:04:55 AM	H2 MFC set to  500.000000
10/5/2010	4:04:55 AM	BCl3 MFC set to  0.000000
10/5/2010	4:04:55 AM	PHl3 MFC set to  0.000000
10/5/2010	4:04:55 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:04:55 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	4:04:55 AM	Tube furnace set to 1000
10/5/2010	4:04:58 AM	Helium valve closed
10/5/2010	4:04:58 AM	BCl3 valve closed
10/5/2010	4:04:58 AM	PH3 valve closed
10/5/2010	4:04:58 AM	SiCl4 pre valve closed
10/5/2010	4:04:58 AM	SiCl4 post valve closed
10/5/2010	4:04:58 AM	Main Vac valve closed
10/5/2010	4:04:58 AM	Bypass valve closed
10/5/2010	4:04:58 AM	H2 valve opened
10/5/2010	4:04:58 AM	Bubbler valve opened
10/5/2010	4:04:58 AM	Helium MFC set to  0.000000
10/5/2010	4:04:58 AM	H2 MFC set to  500.000000
10/5/2010	4:04:58 AM	BCl3 MFC set to  0.000000
10/5/2010	4:04:58 AM	PHl3 MFC set to  0.000000
10/5/2010	4:04:58 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:04:58 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	4:04:58 AM	Tube furnace set to 1000
10/5/2010	4:05:02 AM	Helium valve closed
10/5/2010	4:05:02 AM	BCl3 valve closed
10/5/2010	4:05:02 AM	PH3 valve closed
10/5/2010	4:05:02 AM	Main Vac valve closed
10/5/2010	4:05:02 AM	Bypass valve closed
10/5/2010	4:05:02 AM	H2 valve opened
10/5/2010	4:05:02 AM	SiCl4 pre valve opened
10/5/2010	4:05:02 AM	SiCl4 post valve opened
10/5/2010	4:05:02 AM	Bubbler valve opened
10/5/2010	4:05:02 AM	Helium MFC set to  0.000000
10/5/2010	4:05:02 AM	H2 MFC set to  500.000000
10/5/2010	4:05:02 AM	BCl3 MFC set to  0.000000
10/5/2010	4:05:02 AM	PHl3 MFC set to  0.000000
10/5/2010	4:05:02 AM	SiCl4 MFC set to  50.000000
10/5/2010	4:05:02 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	4:05:02 AM	Tube furnace set to 1000
10/5/2010	4:05:03 AM	Helium valve closed
10/5/2010	4:05:03 AM	BCl3 valve closed
10/5/2010	4:05:03 AM	PH3 valve closed
10/5/2010	4:05:03 AM	SiCl4 pre valve closed
10/5/2010	4:05:03 AM	SiCl4 post valve closed
10/5/2010	4:05:03 AM	Main Vac valve closed
10/5/2010	4:05:03 AM	Bypass valve closed
10/5/2010	4:05:03 AM	H2 valve opened
10/5/2010	4:05:03 AM	Bubbler valve opened
10/5/2010	4:05:03 AM	Helium MFC set to  0.000000
10/5/2010	4:05:03 AM	H2 MFC set to  500.000000
10/5/2010	4:05:03 AM	BCl3 MFC set to  0.000000
10/5/2010	4:05:03 AM	PHl3 MFC set to  0.000000
10/5/2010	4:05:03 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:05:03 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	4:05:03 AM	Tube furnace set to 750
10/5/2010	4:23:19 AM	H2 valve closed
10/5/2010	4:23:19 AM	BCl3 valve closed
10/5/2010	4:23:19 AM	PH3 valve closed
10/5/2010	4:23:19 AM	SiCl4 pre valve closed
10/5/2010	4:23:19 AM	SiCl4 post valve closed
10/5/2010	4:23:19 AM	Main Vac valve closed
10/5/2010	4:23:19 AM	Bypass valve closed
10/5/2010	4:23:19 AM	Helium valve opened
10/5/2010	4:23:19 AM	Bubbler valve opened
10/5/2010	4:23:19 AM	Helium MFC set to  500.000000
10/5/2010	4:23:19 AM	H2 MFC set to  0.000000
10/5/2010	4:23:19 AM	BCl3 MFC set to  0.000000
10/5/2010	4:23:19 AM	PHl3 MFC set to  0.000000
10/5/2010	4:23:19 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:23:19 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	4:23:19 AM	Tube furnace set to 0
10/5/2010	4:24:21 AM	Run aborted at 4:24 AM
10/5/2010	4:24:21 AM	Helium valve closed
10/5/2010	4:24:21 AM	H2 valve closed
10/5/2010	4:24:21 AM	BCl3 valve closed
10/5/2010	4:24:21 AM	PH3 valve closed
10/5/2010	4:24:21 AM	SiCl4 pre valve closed
10/5/2010	4:24:21 AM	SiCl4 post valve closed
10/5/2010	4:24:21 AM	Bypass valve closed
10/5/2010	4:24:21 AM	Main Vac valve closed
10/5/2010	4:24:21 AM	Bubbler valve closed
10/5/2010	4:24:21 AM	Helium MFC set to  0.000000
10/5/2010	4:24:21 AM	H2 MFC set to  0.000000
10/5/2010	4:24:21 AM	BCl3 MFC set to  0.000000
10/5/2010	4:24:21 AM	PHl3 MFC set to  0.000000
10/5/2010	4:24:21 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:24:21 AM	Tube furnace set to 0
10/5/2010	4:29:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2010	4:29:39 AM	Recipe started at 4:29 AM
10/5/2010	4:29:39 AM	Helium valve closed
10/5/2010	4:29:39 AM	H2 valve closed
10/5/2010	4:29:39 AM	BCl3 valve closed
10/5/2010	4:29:39 AM	PH3 valve closed
10/5/2010	4:29:39 AM	SiCl4 pre valve closed
10/5/2010	4:29:39 AM	SiCl4 post valve closed
10/5/2010	4:29:39 AM	Main Vac valve closed
10/5/2010	4:29:39 AM	Bubbler valve closed
10/5/2010	4:29:39 AM	Bypass valve opened
10/5/2010	4:29:39 AM	Helium MFC set to  0.000000
10/5/2010	4:29:39 AM	H2 MFC set to  0.000000
10/5/2010	4:29:39 AM	BCl3 MFC set to  0.000000
10/5/2010	4:29:39 AM	PHl3 MFC set to  0.000000
10/5/2010	4:29:39 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:29:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	4:29:39 AM	Tube furnace set to 0
10/5/2010	4:30:22 AM	Helium valve closed
10/5/2010	4:30:22 AM	H2 valve closed
10/5/2010	4:30:22 AM	BCl3 valve closed
10/5/2010	4:30:22 AM	PH3 valve closed
10/5/2010	4:30:22 AM	SiCl4 pre valve closed
10/5/2010	4:30:22 AM	SiCl4 post valve closed
10/5/2010	4:30:22 AM	Bubbler valve closed
10/5/2010	4:30:22 AM	Main Vac valve opened
10/5/2010	4:30:22 AM	Bypass valve opened
10/5/2010	4:30:22 AM	Helium MFC set to  0.000000
10/5/2010	4:30:22 AM	H2 MFC set to  0.000000
10/5/2010	4:30:23 AM	BCl3 MFC set to  0.000000
10/5/2010	4:30:23 AM	PHl3 MFC set to  0.000000
10/5/2010	4:30:23 AM	SiCl4 MFC set to  0.000000
10/5/2010	4:30:23 AM	Bypass solenoid MFC set to  0.000000
10/5/2010	4:30:23 AM	Tube furnace set to 0
10/5/2010	4:30:23 AM	Run finished at 4:30 AM
10/5/2010	4:30:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
